High-Precision Single Station Spin Coater with Customizable Speed up to 15,000 rpm and Multi-Step Recipe Control for R&D Labs
High-Precision Single Station Spin Coater with Customizable Speed up to 15,000 rpm and Multi-Step Recipe Control for R&D Labs
High-Precision Single Station Spin Coater for R&D Labs This customizable single-station spin coater is designed for uniform thin-film deposition of photoresist, polyimide, sol-gel, nanoparticles, and other functional coatings onto substrates. Available in high-precision R&D, integrated hotplate, and ...
Place of Origin:CHINA
Brand Name:OSMANUV
Certification:ISO9001
Model Number:OSMANUV
Minimum Order Quantity:1 SET
Price:Negotiation
Product Custom Attributes
Highlight
Customizable Speed Spin Coater
,Multi-Step Recipe Spin Coating Machine
,High-Precision Single Station Spin Coater
Controlsystem:
PLC Touch Screen Control
Target Material:
Wafer
Lamp Type:
Carbon Fiber Type
Power Supply:
380V/50Hz
Processing Thickness:
3-80mm
Coating Material:
Water Based Barrier Coat
Embellishment:
Spot UV , Texture , Sandy Effect
Product Size:
Diameter 350-420mm
Product Description
High-Precision Single Station Spin Coater for R&D Labs
This customizable single-station spin coater is designed for uniform thin-film deposition of photoresist, polyimide, sol-gel, nanoparticles, and other functional coatings onto substrates. Available in high-precision R&D, integrated hotplate, and large-format configurations.
The system is fully customizable in spin speed range, substrate size, chuck type, bowl material, and automation level. Spin coating uses centrifugal force to spread a liquid coating evenly across a substrate, achieving film thicknesses from nanometers to several microns with exceptional uniformity.
Key advantages include exceptional speed stability (< ±1% fluctuation), low vibration operation, and a chemical-resistant process bowl (available in PP, PTFE, or stainless steel 316L). The compact benchtop design is ideal for research laboratories, pilot lines, and small-batch production environments. The modular architecture supports future upgrades, including multiple dispense nozzles, nitrogen purge, and in-situ heating modules.
Technical Specifications
| Parameter | High-Precision R&D Model | Integrated Hotplate Model | Large-Format / Production Model |
|---|---|---|---|
| Substrate size (customizable) | Up to 200 mm dia. / square | Up to 200 mm dia. | Up to 450 mm / 18" |
| Spin speed range (customizable) | 100 - 12,000 rpm | 100 - 12,000 rpm | Up to 15,000 rpm |
| Speed accuracy | ±1 rpm or ±0.5% | ±0.5% | ±0.1% (servo motor) |
| Acceleration range (customizable) | 100 - 10,000 rpm/s | Programmable | 1 - 50,000 rpm/s |
| Program steps (customizable) | 10 programs, 20 steps each | Up to 100 steps/program | Unlimited customizable |
| Chuck type (customizable) | Vacuum (aluminum/PTFE/ceramic) | Vacuum (aluminum) | Vacuum / mechanical clamp |
| Bowl material (customizable) | PP / PTFE / Stainless steel 316L | PP / PTFE | Stainless steel |
| Hot plate temperature (optional) | N/A | Ambient - 300°C | Optional |
| Control interface | 4.3" LCD / 7" HMI | 7" HMI touchscreen | PLC + HMI / PC-based |
| Data export | USB (optional) | USB / Ethernet | USB / Ethernet / Modbus |
| Power supply (customizable) | 110/220V, 50/60Hz | 110/220V | 220/380V, 50/60Hz |
| Typical application | Semiconductor, OLED, perovskite | Photoresist + bake | Industrial panels, large wafers |
Applications
- Semiconductor & MEMS: Photoresist coating, electron beam lithography, spin-on glass (SOG)
- Optoelectronics: OLED, quantum dot thin films, anti-reflective coatings
- Materials science: Sol-gel deposition, nanoparticle films, polymer coatings
- Biotechnology: Biosensor fabrication, microfluidic device coating
- Renewable energy: Perovskite solar cells, thin-film photovoltaic
- Optical industry: Lens hard coating (with UV curing option)
Key Features
- High precision spin control: High-torque brushless motor with ±0.5% speed accuracy and programmable acceleration ensures repeatable, uniform coating
- R&D-focused design: Multi-step recipe programming and data logging capabilities for systematic process development
- Versatile fixturing: Customizable chucks and fixtures securely hold complex geometries or fragile substrates
- Chemical-resistant construction: PTFE, PP, or stainless steel bowls for aggressive solvents
- User-friendly interface: Intuitive touchscreen HMI with recipe storage for quick recall of optimized parameters
- Compact footprint: Benchtop design saves valuable lab or production floor space
- Safety interlocks: Automatic stop when lid is opened during operation
- Data traceability: Recipe storage, real-time monitoring, USB/Ethernet export
Customization Options
This single-station spin coater is highly customizable to meet your specific application requirements:
- Spin speed range: From 50 rpm up to 15,000 rpm - customizable
- Chuck design & size: Custom-machined vacuum chucks for round (up to 450 mm), square, rectangular, or irregular substrates - fully customizable
- Bowl material: Polypropylene (PP), PTFE, stainless steel 316L - customizable for solvent resistance
- Fixture type: Vacuum chuck, mechanical clamp, or custom 3D-printed holders - customizable
- Dispense system: Manual syringe / automated syringe pump / solenoid valve / multi-nozzle array - customizable
- Heating integration: Optional in-situ IR heaters or hot plates up to 300°C - customizable
- Environmental control: Inert gas purge (N₂), humidity control, glovebox integration - customizable
- Software: Recipe management, data logging, USB/Ethernet export - customizable
- Automation level: Fully manual to semi-automatic with automated dispense and cycle control - customizable
- Safety: Interlocked enclosures, emergency stop, spill containment - customizable
Support and Services
- Free process consulting and material testing - send us your substrates
- Custom fixture design and engineering services
- On-site installation and commissioning (customizable support packages)
- Operator training program included
- Remote troubleshooting within 24 hours via video call
- 18-month warranty on motor and controller, 12-month on accessories
- Spare parts availability from regional warehouses (US/EU/Asia)
- Lifetime technical support via phone, email, or chat
Packing and Shipping
- Packing: Anti-static foam + reinforced wooden case (with desiccant for moisture-sensitive components)
- Standard model lead time: 15-25 days after order confirmation
- Custom configuration lead time: 30-45 days (longer for custom chucks or bowls)
- Shipping: FOB Shanghai / CIF by sea, air, or rail
- Customizable: Export crating, custom labeling, destination port documentation
Frequently Asked Questions
Q1: What is the maximum substrate size this spin coater can handle?
A: Standard R&D models handle up to 150-200 mm (6-8") diameter wafers. For large-format applications, we offer customizable chucks up to 450 mm (18") substrates. Square substrates up to 150×150 mm are also supported.
Q2: Can I use this spin coater for non-round substrates?
A: Yes. We offer customizable vacuum chucks and mechanical fixtures for square, rectangular, and irregularly shaped substrates. Custom chucks can also be 3D-printed to fit specific product geometries. Please provide your substrate dimensions for custom fixture design.
Q3: What is the typical coating thickness uniformity?
A: With proper process optimization, thickness uniformity can reach < ±1% across the substrate. Results vary by material viscosity, spin parameters, and substrate geometry. We offer free lab testing to confirm your specific application.