High-Throughput 24-Position Automatic Spin Coating System – For Wafer, Glass, OLED Substrates – Customizable Dispensing

Product Details:

Place of Origin: CHINA
Brand Name: OSMANUV
Certification: ISO9001
Model Number: Specification

Payment & Shipping Terms:

Minimum Order Quantity: 1 set
Price: Negotiation
Packaging Details: WOOD PACKAGING
Delivery Time: 30-45 days
Payment Terms: T/T
Supply Ability: Negotiation
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Detail Information

Weight: Net Weight: 150KG; Gross Weight: 160KG Production Name: 24-station Spin Coating Line
Coating Way: Spin Coating Application Type: Industrial
Material: Pulp Control Interface: A 7-inch Nylon Touch Screen
Safety Features: Emergency Stop, Overload Protection Key Selling Points: Pulp Molded Coating

Product Description

High-Throughput 24-Position Automatic Spin Coating System – For Wafer, Glass, OLED Substrates – Customizable Dispensing
Product Overview
The 24-Station Spin Coater is a high-throughput thin-film coating system designed for uniform deposition of photoresist, polymers, sol-gel, and nanoparticles onto wafers, glass substrates, or discs. Each station can be independently programmed or run in batch mode.
The machine is fully customizable - station arrangement, spin speed profiles, dispensing method, bowl material, and exhaust design - to suit R&D, pilot line, or production environments.
Technical Parameters
Parameter Standard Value Customizable Range
Number of stations 24 12 / 16 / 24 / customizable
Max substrate diameter 8 inches (200 mm) Up to 12 inches (300 mm) customizable
Spin speed range 100 - 8000 RPM 1 - 12000 RPM customizable
Speed accuracy ±1 RPM ±0.5 RPM customizable (closed-loop)
Acceleration range 100 - 20000 RPM/s Customizable via software
Programmable steps 10 steps per recipe Customizable (unlimited via PC)
Recipe storage 100 recipes (on HMI) Customizable (network drive / cloud)
Dispense types Static, dynamic, line, spiral Customizable nozzle pattern & timing
Bowl material Polypropylene (PP) PTFE / stainless steel / glass customizable
Vacuum chuck type Single center hole Multi-zone / edge grip customizable
Exhaust flow rate 60 m³/h per station Customizable to cleanroom requirements
Power supply 220V / 50Hz (single phase) 110V - 240V, 50/60Hz customizable
Applications
  • Semiconductor / MEMS - photoresist coating for wafers (2″ to 8″)
  • OLED / display manufacturing - polymer layer deposition
  • University & research labs - material science, sol-gel films
  • Medical device coating - bio-compatible films
  • Customizable for: perovskite solar cells, carbon nanotube deposition, thick-film pastes
Key Features
  • Batch or independent station operation - each station can run different recipes
  • Closed-loop RPM control - maintains speed under varying loads
  • Edge bead removal (EBR) optional on selected stations
  • Auto-dispense synchronization with spin acceleration profile
  • Vacuum sense & interlock - prevents spin without proper chuck vacuum
  • Touchscreen interface with real-time speed / time / step display
Customization Options
All models support full customization:
  • Number of stations (up to 48 in dual-tier configuration)
  • Spin motor type (brushless DC / servo / air-driven)
  • Dispensing automation (syringe pump / peristaltic / pressurized tank)
  • Environmental control (temperature / humidity / inert gas purging)
  • Cleanroom compatibility (Class 10 to Class 100,000 - customizable)
  • SECS/GEM or RS232 data export for manufacturing execution systems
Support and Services
  • 24-month warranty on electronics, 12 months on motors
  • Lifetime phone / email / WhatsApp technical support
  • On-site training and installation (for industrial models)
  • Spare parts shipped globally within 48 hours
  • Customization engineering support (CAD drawings + PLC code) included
Packing and Shipping
  • Packing: Anti-static vacuum bag + foam fixture + reinforced export carton (bench models) or plywood crate (floor models)
  • Shipping methods: DHL/FedEx (small units), sea freight (FOB/CIF), air cargo
  • Delivery lead time: 20 - 45 days based on customization level
Frequently Asked Questions
Q: Can all 24 stations run simultaneously at different speeds?
A: Yes and no - In independent motor version (higher cost), yes. In shared-drive version, all run same speed but can have different dispense timing - customizable to your need.
Q: What is the minimum substrate size the chuck can hold?
A: Standard chucks hold 2″ to 8″. For smaller pieces (1 cm × 1 cm), we can customize vacuum chucks with reduced vacuum zones.
Q: Can I use this coater for high-viscosity materials (like SU-8 or thick photoresist)?
A: Yes. We can customize the motor torque and dispense nozzle (larger gauge) for high-viscosity applications.

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