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Product Details:
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| Coating Thickness: | 180g ~ 400g | Inverter Brand: | Schneider |
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| Conveying Direction: | From Left To Right. | Humidity: | 50±10℃ |
| Registration Precision: | ± 0.15 Mm | Machinery Test Report: | Provided |
| Average Speed: | 0 ~ 20 M/min | Max Coating Width: | 790*1150mm |
| Highlight: | 12-station automatic spin coater,semiconductor film deposition machine,perovskite spin coating equipment |
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This 12-station spin coater is designed for high-throughput thin film deposition, supporting wafers, glass, and flexible substrates. Each station offers independent speed, acceleration, and coating time settings with closed-loop control achieving ±1 rpm accuracy. The number of stations, dispensing method, chamber size, and exhaust system are all customizable, making it ideal for both R&D and pilot production.
| Parameter | Value / Range | Customization Option |
|---|---|---|
| Number of stations | 12 | Customizable: 4 / 8 / 12 / 16 stations |
| Speed range | 100 - 10,000 rpm | Extendable to 12,000 rpm |
| Acceleration range | 50 - 10,000 rpm/s | Customizable |
| Speed accuracy | ±1 rpm | - |
| Max substrate size | 150 mm diameter | Customizable up to 200 mm |
| Chamber material | PP / PTFE / 316L stainless steel | Customizable contact materials |
| Environmental control | Exhaust & purge available | Customizable N₂ purge module |
| Program storage | 1000+ recipes | - |
| Power supply | AC 220V / 50Hz | Customizable to 110V / 60Hz |
Contact Person: Mr. Zhang guoxin
Tel: +86 13926890692
Fax: 86-769-88120350