|
Product Details:
|
| Material: | Pulp | Coating Means: | DOD Inkjet Heads |
|---|---|---|---|
| Heating Source: | Electric IR Heating | Coating Area: | Large Area |
| Heating Method: | Electric | Coating Thickness Control: | Adjustable |
| Dimension: | As Customer Requirement | Model: | OSM-XT-450T |
| Production Line Integration: | Can Be Integrated Into Pulp Molding Production Line | ||
| Highlight: | 24-position rotary spin coater,programmable spin coater for thin-film deposition,customizable substrate size spin coater |
||
This 24-station spin coater is designed for high-throughput thin-film deposition of photoresist, polymers, nanoparticles, and sol-gel materials. Each station operates independently or synchronously. The system supports customizable spin profiles (acceleration, duration, speed) for each station, making it ideal for both R&D and production environments.
| Parameter | Value / Range | Customization Option |
|---|---|---|
| Number of stations | 24 | ✔ Customizable (16/24/32 stations) |
| Substrate size | Up to 12" wafer or 300×300 mm panel | ✔ Customizable chuck size |
| Spin speed range | 100 - 12,000 rpm | ✔ Programmable per station |
| Speed accuracy | ±1 rpm | - |
| Acceleration range | 100 - 10,000 rpm/s | ✔ Adjustable per recipe |
| Spin time range | 1 - 999 sec / step | ✔ Customizable steps |
| Dispense volume | 0.1 - 20 mL per nozzle | ✔ Customizable nozzle type |
| Motor type | Brushless DC servo | - |
| Coating uniformity | ±3% (across 24 stations) | ✔ Upgradable to ±1% |
| Exhaust flow | 150 - 500 m³/h | ✔ Customizable exhaust interface |
| Power supply | 220V / 50-60 Hz / 3.5 kW | ✔ Customizable voltage |
| Dimensions (L×W×H) | 1800×1200×900 mm | ✔ Customizable footprint |
| Weight | 520 kg | - |
We offer full customization:
Contact Person: Mr. Zhang guoxin
Tel: +86 13926890692
Fax: 86-769-88120350